POLISHING COMPOSITION Russian patent published in 2017 - IPC C09G1/02 B24B37/00 C09K3/14 H01L21/304 

Abstract RU 2620836 C2

FIELD: chemistry.

SUBSTANCE: polishing composition comprises at least water and silicon dioxide. The specific surface area of silicon dioxide is 30 m2/g or more. Silicon dioxide is used, having a particle size of 10 to 50 nm, and silicon dioxide having a particle size of 60 to 300 nm, each of which is contained in the polishing composition in an amount of 2% by weight or more. The value obtained by dividing the larger average size of said silicon dioxide particles by the smaller average size of said silicon dioxide particles is 2 or more.

EFFECT: high-speed polishing of substrates from solid and brittle material is provided, with preserving the speed over a long period of time while using the polishing composition repeatedly.

7 cl, 2 tbl

Similar patents RU2620836C2

Title Year Author Number
POLISHING COMPOSITION 2012
  • Asano Khirosi
  • Tamai Kadzusei
  • Okada Yasunori
RU2591152C2
POLISHING SLURRY FOR SAPPHIRE SUBSTRATES 2017
  • Maksyutin Aleksandr Sergeevich
  • Zotov Nikolaj Aleksandrovich
RU2635132C1
AQUEOUS POLISHING COMPOSITION AND PROCESS FOR CHEMICALLY MECHANICALLY POLISHING SUBSTRATES FOR ELECTRICAL, MECHANICAL AND OPTICAL DEVICES 2011
  • Li Yuzhuo
  • Chu Dzhea-Dzhu
  • Venkataraman Shiam Sundar
  • Usman Ibrakhim Shejk Ansar
  • Pinder Kharvi Uejn
RU2607214C2
WATER POLISHING COMPOSITION AND METHOD OF CHEMICAL-MECHANICAL POLISHING OF SUBSTRATE MATERIALS FOR ELECTRIC, MECHANICAL AND OPTICAL DEVICES 2011
  • Li Juzhuo
  • Chu Dzhea-Dzhu
  • Venkataraman Shiam Sundar
  • Usman Ibrakhim Shejk Ansar
  • Pinder Kharvi Uejn
RU2577281C2
AQUEOUS POLISHING COMPOSITION AND METHOD FOR CHEMICAL-MECHANICAL POLISHING OF SUBSTRATES HAVING POLYSILICON AND SILICON OXIDE DIELECTRIC FILMS 2011
  • Li Juzhuo
  • Chu Dzhea-Dzhu
  • Venkataraman Shiam Sundar
  • Chiu Vej Lan Uilliam
  • Pinder Kharvi Uehjn
RU2573672C2
AQUEOUS POLISHING COMPOSITION AND METHOD FOR CHEMICAL-MECHANICAL POLISHING OF SUBSTRATES, HAVING STRUCTURED OR UNSTRUCTURED DIELECTRIC LAYERS WITH LOW DIELECTRIC CONSTANT 2011
  • Raman Vidzhaj Immanuel
  • Rittig Frank
  • Li Yujchzho
  • Chiu Vej Lan Uilyam
RU2589482C2
AQUEOUS POLISHING COMPOSITION AND METHOD FOR CHEMICAL-MECHANICAL POLISHING OF SUBSTRATES, CONTAINING FILM BASED ON SILICON OXIDE DIELECTRIC AND BASED ON POLYCRYSTALLINE SILICON 2011
  • Venkataraman Shiam Sundar
  • Su Ison Yuj-Shen
  • Kingma Arend Jouke
  • Noller Bastian Marten
RU2588620C2
COMPOSITION FOR CHEMICAL-MECHANICAL POLISHING (CMP) CONTAINING PROTEIN 2013
  • Li Yuzhuo
  • Noller Bastian Marten
  • Lauter Mikhael
  • Lange Roland
RU2631875C2
COMPOSITION FOR CHEMICAL-MECHANICAL POLISHING (CMP) CONTAINING NON-ION SURFACTANT AND CARBONATE SALT 2013
  • Rajkhardt Robert
  • Li Yuzhuo
  • Lauter Mikhael
  • Chiu Vej Lan Uilyam
RU2643541C9
COMPOSITION FOR CHEMICAL-MECHANICAL POLISHING OF THE SURFACE OF SEMICONDUCTOR MATERIALS 2021
  • Artemov Evgenij Aleksandrovich
  • Mantuzov Anton Viktorovich
  • Zarezov Maksim Aleksandrovich
  • Zarezova Nadezhda Viktorovna
RU2782566C1

RU 2 620 836 C2

Authors

Morinaga, Khitosi

Asano, Khirosi

Serikava, Masayuki

Dates

2017-05-30Published

2012-11-06Filed