POLISHING SLURRY FOR SAPPHIRE SUBSTRATES Russian patent published in 2017 - IPC C09G1/02 

Abstract RU 2635132 C1

FIELD: chemistry.

SUBSTANCE: slurry contains, wt %: colloidal silica stabilized with sodium oxide with a particle size of 75-80 nm in terms of silica - 39-40; sodium chloride - 1.2-1.4; calcined soda - 1.6-1.8 and water - up to 100.

EFFECT: increased use time for the polishing slurry, high removal rate and low surface roughness.

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RU 2 635 132 C1

Authors

Maksyutin Aleksandr Sergeevich

Zotov Nikolaj Aleksandrovich

Dates

2017-11-09Published

2017-02-20Filed