DEVICE FOR FORMING QUASI-NEUTRAL BEAM OF OPPOSITELY CHARGED PARTICLES Russian patent published in 2019 - IPC H01J27/18 F03H1/00 

FIELD: technological processes.

SUBSTANCE: invention relates to plasma engineering. In the method, the device comprises: chamber (20); set of means (31, 30, 40, 58) for forming ion-electron plasma in chamber (20); means (50) for extracting and accelerating charged particles from the plasma out of chamber (20), moreover, these particles can form a beam, and means (50) for extraction and acceleration contains set of at least two grids (51, 54) located at one end of the chamber; radio-frequency alternating voltage source (52) for generating a signal that has a radio frequency which is between the plasma frequency of the ions and the plasma frequency of the electrons, moreover, radio-frequency voltage source (52) is connected in series with capacitor (53) and connected at one of its outputs via specified capacitor (53) with one of two grids (51, 54) of specified set of at least two grids (51, 54 ), moreover, at least one other grid from set of at least two grids (51, 54) is under the reference potential, or it is connected to another output of radio-frequency voltage source (52).

EFFECT: increased efficiency and energy of extracted ions.

17 cl, 10 dwg