METHOD OF MANUFACTURE OF FILM MATERIAL BASED ON MIXTURE OF VO PHASES, WHERE X = 1,5-2,02 Russian patent published in 2017 - IPC C23C14/24 C23C14/08 C23C14/58 H01C17/10 

FIELD: chemistry.

SUBSTANCE: method involves thermovacuum spraying of vanadium onto a substrate at room temperature, followed by oxidation in air to form an oxide film. Vanadium coating, thickness 30≤d≤40 nm, doped with impurities W, Si, Al, produced from the evaporator is located inside the vacuum installation by doing one of the following:

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where H=60 mm -specifies the line size of the substrate, l=280-380 mm - distance between the evaporator and the substrate during deposition speed 0.5-1 nm/s Then carry out oxidation in air at a temperature of 300-480°C to the formation of vanadium oxide film on a substrate with controlled quantities of surface resistance in the range⋅ 1-2,4⋅10⁶ Ohm/cm². Invention allows to get the loop thermal hysteresis width 22-24°C, shifted by ~ 10°C in the direction of room temperature, with a jump of resistance inside the loop and a half orders of magnitude that when thermostating provides internal memory mode.

EFFECT: improved properties.

5 dwg, 1 ex, 2 tbl