FIELD: physics.
SUBSTANCE: scanning optical system (10) provides that: the optical source (22), which provides the beam (38) pulse duration of Ultrashort pulse; deflector (26) for refusing the scan angle: beam lens system, including which device (30) for focusing the rejected beam; dispersion compensation device (25) in order to reduce distortion of the beam pulse associated with variance, using a system of lenses, dispersion compensation device, including strain dispersion mirror (42) and drive (44) for the mirrors; as well as controller (18) to control the drive to change the shape of the mirrors in accordance with angle of scanning.
EFFECT: reduction of distortion.
9 cl, 3 dwg
Authors
Dates
2017-08-29—Published
2013-03-15—Filed