FIELD: physics.
SUBSTANCE: invention relates to laser engineering. Method of scanning using a laser system comprises steps of: generating femtosecond focusing pulses by means of a generator, increasing the duration of inoculating pulses using a stretching module, amplified stretched inoculating pulses with formation of laser pulses with the help of amplifier, compensate dispersion of group delay of laser pulses in range of 5,000–20,000 fs2 by means of dispersion compensator between end mirrors of amplifier. Laser pulses are output from amplifier by means of optical switch at first repetition frequency, duration of laser pulses in range of 1–1,000 fs is reduced by means of compression module, laser pulses are focused into a focal spot in the first target region using a scanning laser beam delivery system. At that, focal spot is scanned with the first repetition frequency in the first target area using the scanning laser beam delivery system, changing the first repetition frequency to the second repetition frequency using the repetition rate control module, and scanning the focal spot with a second repetition frequency in the second target area using a scanning laser beam delivery system.
EFFECT: technical result consists in providing possibility of reducing the size of device and simplification of pulse repetition frequency change.
11 cl, 8 dwg
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