METHOD AND DEVICE FOR FORMING MICROCHANNELS ON SUBSTRATES FROM OPTICAL GLASS, OPTICAL CRYSTALS AND SEMICONDUCTOR MATERIALS BY FEMTOSECOND IMPULSES OF LASER RADIATION Russian patent published in 2018 - IPC B23K26/36 B23K26/62 B23K26/82 

FIELD: instrument engineering.

SUBSTANCE: invention relates to the field of optical instrument making, namely laser microprocessing and can be used to form microchannels on the surface of substrates made of glass, crystals and semiconductor materials in the manufacture of optical scales, grids, gratings and other devices. Method for forming the microchannels includes irradiating the surface of the substrate with laser radiation with a femtosecond pulse duration and an ultraviolet wavelength, visible or near infrared range. Laser beam is scanned in a linear raster method along the rows for the length of the microprocessing section with idle zones, one or more microprocessing raster areas that fit the width of the microchannel. In each line, the first pulse is radiated on one boundary of the microprocessing section, and the last – on its other border, the duration of the burst is less than the maximum length of the microprocessing section, at which defects do not appear in the substrate. Distance between lines is not exceeding their width. Length of each idling zone is 5–25 % of the length of the microprocessing section. Raster angle relative to the forming at each point of one of the contours of the raster microprocessing zone is from 35° up to 90°. Laser, systems of formation, two-coordinate scanning and focusing of the beam and the system of positioning and fixing the substrate are connected with the control computer.

EFFECT: technical result is to improve quality of microchannels and the formation of various profiles of microchannels.

10 cl, 2 dwg