FIELD: technological processes.
SUBSTANCE: source contains a target having front and backsides and a target mounting element with a cooling channel. The target with the rear side is located on the wall of mentioned fastening element and is fixed to mentioned fastening element by means of fixation means. The wall of the fastening element on which the target is located is made in the form of a flexible membrane separating the cooling channel from the rear side of the target. On the backside of the target and/or on the wall of the fastener on which the target is located, a self-adhesive carbon foil is glued. The method of coating the substrate consists of spraying with the condensation of the material from the gas phase under vacuum conditions and involves depositing the material layer using a material source.
EFFECT: decrease in power consumption.
12 cl, 5 dwg, 1 tbl
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