FIELD: physics.
SUBSTANCE: device comprises a flat target mounted on the base, the first magnetic system located inside the housing with the first water cooling channel, an electric discharge power source and a gas ion source. The base is mounted on the housing. The gas ion source comprises an inner pole tip with the first wall, an outer pole tip with the second wall, an annular anode with the second water cooling channel, a plate with the third water cooling channel, the second magnetic system and a high voltage power source. The first wall and the second wall are located opposite each other and form an exit aperture located on the side of the flat target, and the inner pole tip and the outer pole tip cover the housing from the outside and are separated from it by an insulator.
EFFECT: working pressure is reduced and the quality of the applied coatings is increased.
4 cl, 4 dwg
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