METHOD FOR PRODUCING SPUTTERING COMPOSITE TARGET CONTAINING HEUSLER ALLOY PHASE OF COFeSi Russian patent published in 2017 - IPC B22F3/12 C22B4/06 C22C1/04 H01L21/02 C22C19/07 

Abstract RU 2637845 C1

FIELD: metallurgy.

SUBSTANCE: method involves mechanical mixing of powders of Co2FeSi Heusler alloy components, sintering-pressing of produced mixture by means of electro-impulse plasma at 600°c and minimum pressure of 2.5 kN. Sintering is carried out by passing series of direct current pulses up to 5 kA with pulse duration 3.3 ms by filling powder mixture to produce a compact. After this, the produced compact is melted in quartz crucible of induction furnace at 1300°C for 3 hours till complete melting to produce a homogenised ingot. The produced ingot is crushed and ground to produce particles of 1-200 mcm size, and sintering-pressing of composite target is carried out by electro-impulse plasma sintering method with dilatometric shrinkage curve control.

EFFECT: production of homogenised mechanically strong composite target of specified geometry containing Heusler alloy phase of stoichiometric composition.

7 cl, 4 dwg

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RU 2 637 845 C1

Authors

Demidov Evgenij Sergeevich

Sdobnyakov Viktor Vladimirovich

Chuvildeev Vladimir Nikolaevich

Chigirinskij Yurij Isaakovich

Lesnikov Valerij Pavlovich

Trushin Vladimir Nikolaevich

Boldin Maksim Sergeevich

Belkin Oleg Anatolevich

Bobrov Aleksandr Andreevich

Sakharov Nikita Vladimirovich

Dates

2017-12-07Published

2016-12-26Filed