METHOD FOR PRODUCING SPRAYABLE COMPOSITE TARGET FROM CoMnSi HEUSLER ALLOY Russian patent published in 2019 - IPC B22F3/12 C22B4/06 C22C19/07 C22C1/04 H01L21/02 

Abstract RU 2678354 C1

FIELD: technological processes.

SUBSTANCE: invention relates to the manufacture of sprayable composite targets of Co2MnSi Heusler alloy, which can be used in the production of microelectronics. Method involves mechanical mixing of the powders of the alloy components to obtain a homogeneous powder mixture and sintering it. Sintering the powder mixture is carried out by the method of electropulse plasma sintering in a graphite mold at a temperature of 600 °C and a minimum pressure of 2.5 kN by passing sequences of DC pulses of 5,000 A with a pulse duration of 3.3 ms through the filling of the powder mixture to obtain a composite target. Target porosity is monitored based on the data of the dilatometric shrinkage curve.

EFFECT: mechanically strong, not oxidized, composite targets of an alloy with a porosity in the range of 10–30 % are obtained.

1 cl, 3 dwg, 1 ex

Similar patents RU2678354C1

Title Year Author Number
METHOD FOR MAKING SPRAY COMPOSITE TARGET FROM HEUSLER ALLOY CoFeSi 2016
  • Demidov Evgenij Sergeevich
  • Sdobnyakov Viktor Vladimirovich
  • Chuvildeev Vladimir Nikolaevich
  • Chigirinskij Yurij Isaakovich
  • Lesnikov Valerij Pavlovich
  • Trushin Vladimir Nikolaevich
  • Boldin Maksim Sergeevich
  • Belkin Oleg Anatolevich
  • Bobrov Aleksandr Andreevich
  • Sakharov Nikita Vladimirovich
RU2644223C1
METHOD FOR PRODUCING SPRAYABLE COMPOSITE TARGET CONTAINING CoMnSi HEUSLER ALLOY PHASE 2017
  • Demidov Evgenij Sergeevich
  • Sdobnyakov Viktor Vladimirovich
  • Chuvildeev Vladimir Nikolaevich
  • Chigirinskij Yurij Isaakovich
  • Lesnikov Valerij Pavlovich
  • Trushin Vladimir Nikolaevich
  • Boldin Maksim Sergeevich
  • Belkin Oleg Anatolevich
  • Bobrov Aleksandr Andreevich
  • Sakharov Nikita Vladimirovich
RU2678355C1
METHOD FOR PRODUCING SPUTTERING COMPOSITE TARGET CONTAINING HEUSLER ALLOY PHASE OF COFeSi 2016
  • Demidov Evgenij Sergeevich
  • Sdobnyakov Viktor Vladimirovich
  • Chuvildeev Vladimir Nikolaevich
  • Chigirinskij Yurij Isaakovich
  • Lesnikov Valerij Pavlovich
  • Trushin Vladimir Nikolaevich
  • Boldin Maksim Sergeevich
  • Belkin Oleg Anatolevich
  • Bobrov Aleksandr Andreevich
  • Sakharov Nikita Vladimirovich
RU2637845C1
METHOD OF ACHIEVING COMBINATION OF HIGH HARDNESS AND CRACK RESISTANCE OF HIGH-DENSITY NANOSTRUCTURED TUNGSTEN CARBIDE ARTICLES 2013
  • Chuvil'Deev Vladimir Nikolaevich
  • Boldin Maksim Sergeevich
  • Moskvicheva Anna Vladimirovna
  • Sakharov Nikita Vladimirovich
  • Blagoveshchenskij Jurij Vjacheslavovich
  • Nokhrin Aleksej Vladimirovich
  • Shotin Sergej Viktorovich
  • Isaeva Natal'Ja Vjacheslavovna
RU2548252C2
METHOD FOR PRODUCING THERMOELECTRIC MATERIAL OF N-TYPE CONDUCTIVITY BASED ON SOLID SOLUTION GESISB AT X = 0.26-0.36, δ = 0.008-0.01 2020
  • Dorokhin Mikhail Vladimirovich
  • Kuznetsov Iurii Mikhailovich
  • Erofeeva Irina Viktorovna
  • Demina Polina Borisovna
  • Zdoroveishchev Anton Vladimirovich
  • Lantsev Evgenii Andreevich
  • Popov Aleksandr Aleksandrovich
  • Uskova Elena Afanasevna
  • Boriakov Aleksei Vladimirovich
RU2739887C1
METHOD FOR OBTAINING LOW-TEMPERATURE BIORESORBABLE COMPOSITE MATERIAL BASED ON HYDROXYAPATITE, REINFORCED WITH MAGNESIUM PARTICLES USING ELECTRO-PULSE COMPACTION METHOD FOR USE AS IMPLANT IN OSTEOSYNTHESIS 2021
  • Krokhicheva Polina Alekseevna
  • Khajrutdinova Dinara Rustamovna
  • Goldberg Margarita Aleksandrovna
  • Kazakova Viktoriya Nikolaevna
  • Shortnikov Dmitrij Pavlovich
  • Barinov Sergej Mironovich
  • Komlev Vladimir Sergeevich
RU2760096C1
METHOD FOR IMPROVING MECHANICAL PROPERTIES OF HEAVY ALLOY POWDER PRODUCTS BASED ON TUNGSTEN AND POWDER PRODUCT WITH SAID IMPROVED PROPERTIES 2009
  • Chuvil'Deev Vladimir Nikolaevich
  • Nokhrin Aleksej Vladimirovich
  • Moskvicheva Anna Vladimirovna
  • Lopatin Jurij Gennad'Evich
  • Baranov Gleb Viktorovich
  • Belov Vladimir Jur'Evich
RU2442834C2
METHOD OF MANUFACTURING PELLETIZED NUCLEAR FUEL 2017
  • Tumanov Yurij Nikolaevich
  • Zaretskij Nikolaj Panteleevich
  • Tumanov Denis Yurevich
  • Dedov Nikolaj Vladimirovich
  • Zhiganov Aleksandr Nikolaevich
  • Tochilin Sergej Borisovich
  • Rusakov Igor Yurevich
RU2664738C1
METHOD OF MAKING CERAMIC ARTICLES FROM POWDER 2017
  • Abduev Aslan Khadzhimuratovich
  • Abduev Marat Khadzhi-Muratovich
  • Asvarov Abil Shamsudinovich
  • Akhmedov Akhmed Kadievich
RU2704777C2
METHOD OF PRODUCTION OF A THIN-FILM THERMOELECTRIC CONVERTER BASED ON CHROMIUM DISILICIDE 2022
  • Dorokhin Mikhail Vladimirovich
  • Lesnikov Valerii Pavlovich
  • Kuznetsov Iurii Mikhailovich
  • Erofeeva Irina Viktorovna
  • Demina Polina Borisovna
RU2803976C1

RU 2 678 354 C1

Authors

Demidov Evgenij Sergeevich

Sdobnyakov Viktor Vladimirovich

Chuvildeev Vladimir Nikolaevich

Chigirinskij Yurij Isaakovich

Lesnikov Valerij Pavlovich

Trushin Vladimir Nikolaevich

Boldin Maksim Sergeevich

Belkin Oleg Anatolevich

Bobrov Aleksandr Andreevich

Sakharov Nikita Vladimirovich

Dates

2019-01-28Published

2017-11-07Filed