METHOD FOR PRODUCING SPRAYABLE COMPOSITE TARGET FROM CoMnSi HEUSLER ALLOY Russian patent published in 2019 - IPC B22F3/12 C22B4/06 C22C19/07 C22C1/04 H01L21/02 

FIELD: technological processes.

SUBSTANCE: invention relates to the manufacture of sprayable composite targets of Co₂MnSi Heusler alloy, which can be used in the production of microelectronics. Method involves mechanical mixing of the powders of the alloy components to obtain a homogeneous powder mixture and sintering it. Sintering the powder mixture is carried out by the method of electropulse plasma sintering in a graphite mold at a temperature of 600 °C and a minimum pressure of 2.5 kN by passing sequences of DC pulses of 5,000 A with a pulse duration of 3.3 ms through the filling of the powder mixture to obtain a composite target. Target porosity is monitored based on the data of the dilatometric shrinkage curve.

EFFECT: mechanically strong, not oxidized, composite targets of an alloy with a porosity in the range of 10–30 % are obtained.

1 cl, 3 dwg, 1 ex