METHOD FOR MAKING SPRAY COMPOSITE TARGET FROM HEUSLER ALLOY CoFeSi Russian patent published in 2018 - IPC B22F3/12 C22B4/06 C22C1/04 H01L21/02 C22C19/07 

FIELD: technological processes.

SUBSTANCE: method involves mechanical mixing of Heusler alloy Co₂FeSi powders to obtain a homogeneous powder mixture and its sintering. Powder mixture is prepared from high-purity powders of cobalt, iron and silicon. Sintering of powder mixtures is led by method electro impulse plasma sintering in graphite mould at a temperature of 600°C, and a minimum pressure of 2.5 kN by passing sequences of pulses of DC 5000 A and duration of pulse 3.3 Ms through the filling of powder mixtures with obtaining composite target from Heusler alloy Co₂FeSi. The porosity of the target is monitored on the basis of the dilatometric shrinkage curve data.

EFFECT: obtaining mechanically strong, non-oxidized composite targets with a porosity in the range of 10-30 percent.

2 cl, 3 dwg, 1 ex