FIELD: electricity.
SUBSTANCE: device for precision movements contains two elements of piezoelectric material. The electrodes connected to the voltage power supply are placed on two opposite sides of each element. Mentioned elements are mounted on the base with common electrode for both elements and are designed in the way that the direction vectors of the control voltage deformation are collinear and oppositely directed upon the same polarity of the control voltage.
EFFECT: providing calibration of modern confocal microscopes and optical interferometers which are used in production sector.
3 cl, 1 dwg
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|---|---|---|---|
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|
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| PRECISION PIEZOELECTRIC DRIVE | 2001 |
|
RU2190920C1 |
