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2 656 103

(13)

(51)

IPC

C07F5/00(2006-01-01)

C23C18/12(2006-01-01)

H01L21/285(2006-01-01)

(21) (22)

Application

2016101945, 2014-05-15

(24)

Start date

2014-05-15

(22)

Actual filing date

2014-05-15

(45)

Published

2018-05-31

(72)

Inventor

Steiger, JurgenPham, Duy VuNeumann, AnitaMerkulov, AlexeyHoppe, ArneFruhling, Dennis

(73)

Holder

Evonik Degussa Gmbh

PROCESS FOR PREPARING INDIUM ALKOXIDE COMPOUNDS, INDIUM ALKOXIDE COMPOUNDS PREPARED BY PROCESS AND USE THEREOF Russian patent published in 2018 - IPC C07F5/00 C23C18/12 H01L21/285

Abstract RU 2656103 C2

FIELD: electricity.

SUBSTANCE: invention relates to an indium alkoxide compound which is obtained by reacting an indium trihalide InX₃, where X = F, Cl, Br, I, with a secondary amine of formula R'₂NH, where R'= C₁C₁₀-alkyl, in a molar ratio of 8:1 to 20:1 with respect to indium trihalide, in the presence of an alcohol of general formula ROH, where R = C₁C₁₀-alkyl. Method for the preparation of an indium alkoxide and use thereof are also disclosed.

EFFECT: indium alkoxide compound is used to prepare indium oxide-containing coatings having excellent electrical properties.

12 cl, 1 dwg, 2 ex

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RU 2 656 103 C2

Authors

Steiger, Jurgen

Pham, Duy Vu

Neumann, Anita

Merkulov, Alexey

Hoppe, Arne

Fruhling, Dennis

Dates

2018-05-31—Published

2014-05-15—Filed