FORMULATIONS FOR PRODUCING INDIUM OXIDE-CONTAINING LAYERS, METHODS FOR PRODUCING SAID LAYERS AND THE USE THEREOF Russian patent published in 2018 - IPC C07F5/00 C23C18/12 H01L21/285 

FIELD: electricity.

SUBSTANCE: present invention relates to a liquid formulation for the production of indium oxide-containing layers. Composition is prepared by dissolving at least one indium alkoxide compound, which can be obtained by the reaction of indium trichalide InX₃, where X=F, Cl, Br, I, with a secondary amine of formula R'₂NH, where R'= C₁-C₁₀-alkyl in a molar ratio of from 8:1 to 20:1 to indium trihalide in the presence of an alcohol of general formula ROH, where R = C₁-C₁₀-alkyl, at least one solvent selected from the group consisting of primary, secondary, tertiary and aromatic alcohols. Method for preparing the liquid formulation, its use for the production of indium oxide-containing or (semi) conducting layers and a method for the production of indium oxide-containing layers are also provided.

EFFECT: invention makes it possible to improve the properties of layer formation and the properties of the layers obtained.

13 cl, 1 dwg, 2 ex