METHOD OF OBTAINING METAL OXIDE-CONTAINING LAYERS Russian patent published in 2015 - IPC C23C18/12 

FIELD: chemistry.

SUBSTANCE: invention relates to obtaining metal oxide-containing layers of a non-water solution. The method of liquid-phase obtaining the metal-oxide-containing layers from the non-water solution includes the application on a substrate of a water-free composition, containing i) at least one metal oxoalcoxide of the general formula M_xO_y(OR)_z[O(R'O)_cH]_aX_b[R"OH]_d, in which x stands for a number from 3 to 25, y stands for a number from 1 to 10, z stands for a number from 3 to 50, a stands for a number from 0 to 25, b stands for a number from 0 to 20, c stands for a number from 0 to 1, d stands for a number from 0 to 25, M stands for indium, gallium, tin and/or zinc, R, R' and R" respectively stand for an organic residue, X stands for fluorine, chlorine, bromine, iodine, and ii) at least one solvent. In case of necessity the applied composition is dried and converted into a metal oxide-containing layer.

EFFECT: invention makes it possible to obtain metal oxide layers with the targeted, uniform and reproducible stoichiometry, high homogeneity and optimal electric working characteristics.

13 cl, 1 dwg, 1 tbl, 1 ex