COMPOSITION FOR COATING, METHOD FOR PREPARATION THEREOF AND APPLICATION Russian patent published in 2019 - IPC H01L21/316

Abstract RU 2680427 C2

FIELD: chemical industry.

SUBSTANCE: present invention relates to a coating composition prepared from at least one yttrium containing precursor selected from the group including yttrium oxoalkoxides, solvent A and solvent B, which is different from solvent A, the ratio of solvent vapor pressure A at 20 °C to solvent vapor pressure at 20 °C is .

EFFECT: invention provides stabilizing coatings.

13 cl

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RU 2 680 427 C2

Authors

Pham, Duy Vu

Weber, Dennis

Jaehnike, Felix

Dates

2019-02-21—Published

2015-02-09—Filed