METHOD OF MANUFACTURE OF A RADIO APPARATUS Russian patent published in 2018 - IPC H03H9/24 

FIELD: radio engineering.

SUBSTANCE: invention relates to a method for manufacturing a radio receiver using carbon nanotubes. Method of manufacturing a radio receiver with carbon nanotubes comprises forming a dielectric layer 2 on the surface of the substrate 1, the formation of electrically separated cathode 3, anode 4, a radio electrode and a control electrode with contact areas and with the arrangement of their ends along the sides of the rectangle, forming the region of the catalytic layer 7 on the surface of the cathode 3 adjacent to its end, coating with a protective layer 8 of the catalytic layer 7, with the exception of the lateral face adjacent to the end face of the cathode 3, the formation of a depression in the dielectric layer and the substrate with the abutment of the ends of the electrodes to it by projection photolithography and reactive ion plasma etching, the growing of the array of carbon nanotubes 9 by plasma-chemical deposition from the gas phase on the side face of the catalytic layer 7 applied to the cathode 3 facing the depression, splicing the resulting structure and sealing plate with glass solder.

EFFECT: technical result is to increase the stability of the operation and the lifetime of the radio receiver using carbon nanotubes.

11 cl, 11 dwg