MICROELECTROMECHANICAL PRIMARY ACCELERATION TRANSDUCER Russian patent published in 2018 - IPC G01P15/97 

FIELD: measuring equipment.

SUBSTANCE: invention refers to measuring technology, in particular to the measurement of mechanical force and the quantities associated with it: the moment of force, pressure, mass, deformation, linear and angular accelerations. Microelectromechanical primary acceleration converter contains the system of excitation and removal of the frequency signal, the single-crystal plate, in which the slots are made with the formation of at least one sensor element including the mobile inertial mass and the resonator, which is rod-shaped and is made in the form of the double turning fork, one of the ends of the rods of which are rigidly connected to each other, and the others are connected through elastic hinges with inertial mass, the slots with the formation of areas for placing contact surfaces on them are additionally performed in the plate, one of which is located on any fixed part of the sensor, and the other two are located opposite each rod, respectively, in order to excite the antiphase vibrations of the resonator bars, while the rods have the constant or variable width.

EFFECT: high sensitivity.

1 cl, 4 dwg