TIME-OF-FLIGHT PLASMA ION SPECTROMETER Russian patent published in 2018 - IPC H01J49/40 

FIELD: spectrometry.

SUBSTANCE: invention relates to the field of charged particle spectrometry and can be used to measure the charge and mass composition of plasma ions. Time-of-flight spectrometer contains vacuum chamber (1) in which drift tube (2) and ion detector (7) are arranged in series, electrodes (3, 4), transparent to ions and electrically connected to it, are installed at the input and output ends of drift tube (2). Grounded electrode (5) is placed in front of input electrode (3). Drift tube (2) is electrically connected to pulsed accelerating voltage source (8). Between output electrode (4) of drift tube (2) and ion detector (7), electrode (9) is mounted, transparent for ions, electrically connected to the negative output of constant voltage source (11), the second output of which is connected to vacuum chamber (1). Between electrode (9) and ion detector (7) additional electrode (11) is mounted, transparent for ions, electrically connected to the positive output of constant voltage source (12), the second output of which is connected to vacuum chamber (1).

EFFECT: technical result is an increase in the accuracy of measuring the charge-mass composition of plasma ions produced by any plasma source and at any distance from it.

1 cl, 3 dwg