FIELD: acceleration engineering. SUBSTANCE: device that may be used for generating high-energy multiple-beam ion beams of various elements in ion implanting plants and also for injecting heavy ion accelerators has extended tubular electrode mounted in vacuum chamber along ion- beam distribution axis, shaped high-voltage pulse of desired length being applied to this electrode at definite delay relative to laser radiation pulse. EFFECT: simplified design; enhanced energy of multiple-charge ions extracted from laser plasma. 2 cl, 1 dwg
Title | Year | Author | Number |
---|---|---|---|
ION IMPLANTATION METHOD | 2009 |
|
RU2403646C1 |
DEVICE FOR DISCHARGE INITIATION IN GAS LASER | 1996 |
|
RU2096881C1 |
METHOD AND DEVICE FOR PRODUCING SHORT-WAVE RADIATION FROM GAS-DISCHARGE PLASMA | 2000 |
|
RU2206186C2 |
METHOD FOR CONDUCTING THERMONUCLEAR REACTION IN MAGNETIC FUSION REACTOR | 2001 |
|
RU2212063C2 |
SWITCHING DEVICE | 2001 |
|
RU2207647C1 |
GAS-DISCHARGE EXCIMER LASER (VERSIONS) | 2013 |
|
RU2557327C2 |
DISCHARGE SYSTEM FOR EXCIMER LASER (VERSIONS) | 2013 |
|
RU2557325C2 |
HEAVY-POWER CO2 LASER WHICH USES MIX OF AIR WITH CARBON DIOXIDE | 1995 |
|
RU2086064C1 |
DEVICE FOR EXCITING ATMOSPHERIC-PRESSURE DISCHARGE IN GAS LASER | 2000 |
|
RU2195753C2 |
METHOD VISUALIZING IMAGE OF EXAMINED OBJECT ON SCREEN AND DEVICE FOR REALIZATION OF METHOD | 1996 |
|
RU2101800C1 |
Authors
Dates
2002-10-20—Published
2000-11-28—Filed