CALIBRATION / VERIFICATION UNIT AND THE LASER BEAM WIDTH MEASUREMENT MEANS CALIBRATION METHOD Russian patent published in 2018 - IPC G01J1/58 

FIELD: measuring equipment.

SUBSTANCE: invention relates to optical measurements. Laser beam width measuring means calibration / verification device contains the fixed on single base laser radiation source, dividing plate, laser beam width changing mechanism and configured to move main measuring means, as well as control measuring means located on the reflected from the dividing plate laser beam line. Laser beam width changing mechanism is made in the form of a two-lens optical system comprising biconvex and biconcave lens on the movable holder controlling the distance between them in accordance with the control unit signals. Laser beam width measuring means calibrating method with the described device includes setting of the laser beam fixed width, measuring the laser beam energy density distribution using the main and control measuring means, corresponding beam widths and calibration coefficients calculation along the x, y axes, setting the measuring instrument to be calibrated instead of the main one, laser beam width measurement by means of working measuring instruments and determination of the working measuring instruments calibration coefficients.

EFFECT: technical result consists in provision of increase in the accuracy of measurements carried out during the working measuring instruments calibration / verification.

5 cl, 1 dwg, 1 tbl