FIELD: electrical equipment.
SUBSTANCE: use: to create the microelectromechanical devices (MEMD) with increased radiation resistance. Summary of invention is in the fact, that in the structure of the microsystem with increased radiation resistance to the single charged particles action having mechanical part and electrical part with the fractal shape, electrical part micro capacitors plates have the Cantor set three-dimensional fractal shape.
EFFECT: enabling the possibility of the MEMD radiation damage probability reducing, excluding the microsystems failure, as well as the false data reading from them during exposure to the heavy charged particles ionizing radiation.
1 cl, 4 dwg
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