FIELD: coating application.
SUBSTANCE: invention relates to a method for forming transparent conductive layers based on indium oxide doped with zinc. Magnetron sputtering of a composite target consisting of indium oxide and zinc oxide is carried out, and the sputtered material is deposited onto the substrate to form a continuous film. During the sputtering process, the oxygen content in the composition of the working gas is periodically changed, while deposition is carried out on a substrate heated to a temperature of no more than 100°C. Formation of a thickness-modulated film is ensured, consisting of alternating regions with high and low concentrations of oxygen vacancies.
EFFECT: multilayer modulated structure based on a single material, due to no heterointerfaces between individual layers, is free from problems associated with mismatch stresses.
1 cl, 1 tbl, 1 ex
| Title | Year | Author | Number |
|---|---|---|---|
| TRANSPARENT STRUCTURE FOR MICROWAVE SIGNAL MODULATION | 2023 |
|
RU2802548C1 |
| METHOD OF FORMING ZINC OXIDE-BASED LAYERS | 2013 |
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|
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|
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|
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| METHOD FOR PRODUCING ELECTRODE COATINGS FOR OPTOELECTRONIC DEVICES BASED ON HALIDE PEROVSKITES | 2022 |
|
RU2797895C1 |
| METHOD OF MANUFACTURING OF INVERTER AND INVERTER | 2008 |
|
RU2433504C2 |
| METHOD OF PRODUCING LAYER OF TRANSPARENT CONDUCTING OXIDE ON GLASS SUBSTRATE | 2012 |
|
RU2505888C1 |
