FIELD: fault detection.
SUBSTANCE: invention relates to the non-destructive testing methods and can be used: for testing in the radio electronic equipment manufacturing final stage, which elements are covered with the protective dielectric. Essence lies in the fact, that the method is implemented by the controlled object scanning with the conducting plasma jet at the potential difference between plasma and object below the dangerous for the object voltages level, with the flowing through the defect into the plasma current simultaneous recording. If defect is detected, to the defect area the reaction gas stream is sent, including at least one gaseous component capable of polymerizing in the plasma, at that, the plasma jet generation mode is maintained. As a result of such action, on the defect surface polymer coating is formed, closing the defect and thereby eliminating the defect.
EFFECT: combining the defect detection and elimination procedures in the single process cycle.
1 cl, 1 dwg
