TiSiN LAYERS AND PRODUCTION THEREOF Russian patent published in 2018 - IPC C23C14/06 C23C14/35 B23B27/14 

FIELD: manufacturing technology.

SUBSTANCE: invention relates to a method of coating a workpiece (versions). Coating comprises at least one layer of Ti_xSi_1-xN, where x≤0.85. Ti_xSi_1-xN layer contains nanocrystals with an average grain size of no more than 15 nm and have a texture (200). Coating is obtained using a sputtering process. Coating is applied at a current density on the surface of the sputtered target higher than 0.2 A/cm² and a Ti_xSi_1-x target is used, where x≤0.85. Between the Ti_xSi_1-xN layer and the base of the workpiece there is an intermediate layer with TiAlN or CrAlN.

EFFECT: disclosed are Ti_xSi_1-xN layers and production thereof.

14 cl, 7 dwg