METHOD OF OBTAINING MULTI-LAYERED MULTIFUNCTIONAL COATING Russian patent published in 2014 - IPC C23C14/35 C23C14/06 

FIELD: chemistry.

SUBSTANCE: method of obtaining a multi-layered coating on the surface of technological instruments includes an ionic purification of the surface and application of the coating layers by a dual magnetron system with titanium and aluminium magnetrons. The coating layers are applied with a distance from targets to the surface of 140-150 mm, the rate of the surface rotation of 20-25 rev/min and the surface temperature of 473-523 K. First, the titanium Ti sublayer is applied in an argon medium with an increase of discharge current on a titanium target, after that, a transitional layer of titanium nitride TiN is applied by magnetron dispersion of the titanium target in a gas mixture of nitrogen and argon with an increase of discharge current on the titanium target, after which applied are alternating layers of titanium nitride TiN and Ti-Al-N with a nanocrystalline and polycrystalline structure in the gas mixture of nitrogen and argon. The application of the alternating layers is repeated for not fewer than two times until the required thickness of the coating is obtained, with the application of the Ti-Al-N layer with the nanocrystalline structure as the upper one.

EFFECT: obtaining the coating with high physical-mechanical properties, a low friction coefficient, a high adhesive strength of the sublayer with the substrate material between the layers.

3 dwg, 1 tbl