RESONANT SENSOR OF PRESSURE, FORCE OR MOTION AND METHOD OF ITS MANUFACTURING Russian patent published in 2010 - IPC G01L9/08 

FIELD: measurement equipment.

SUBSTANCE: invention is related to the field of measurement equipment, namely to metering converters of pressure, force, accelerations and other mechanical parametres on the basis of resonators arranged from crystalline material, in particular crystalline quartz. Resonant sensor of pressure, force or motion comprises flat membrane and resonators of elastic oscillations arranged from crystalline material and rigidly joined to each other. On surface of membrane there is cantilever formed as a whole with it, having shape of plate, in body of which there are resonators arranged. Cantilever is combined with membrane by one of side faces or areas of one of side faces or areas of one of large faces. Cantilever may have shape of plates, and side faces of resonators may be arranged by means of through holes in plate. Orientation of cantilever faces relative to crystallographic axes of sensor material is selected with account of anisotropy of chemical or plasma-chemical milling speed in sensor material. Some areas of membrane surface inverted to cantilever and at least part of cantilever faces are formed by means of slits in section. Some faces of cantilever plate and some areas of membrane surface - large-size ones - are formed with slits, and other ones - creating thinner and more delicate details of sensor - by chemical or plasma-chemical or ultrasound milling.

EFFECT: improved accuracy of resonant crystalline sensor of low and medium pressures.

8 cl, 17 dwg