GAS ANALYSIS MULTI-SENSOR CHIP BASED ON GRAPHENE AND METHOD OF ITS MANUFACTURING Russian patent published in 2022 - IPC G01N27/12 B82Y40/00 

FIELD: sensor technology.

SUBSTANCE: inventions group relates to the field of sensor technology, in particular to gas sensors of the chemoresistive type and to methods for their manufacture. Gas sensors of the chemoresistive type, which are widely used to detect impurities in the surrounding atmosphere. The graphene-based gas analytical multisensor chip includes a dielectric substrate, on which coplanar strip electrodes of noble metal, thermistors and heaters are formed, while at least a part of the electrode surface and on the substrate between the electrodes is coated with a layer of gas-sensitive material in the form of a layer of functionalized graphene, in which at room temperature, the resistance changes under the influence of impurities of organic vapors or water vapors in the ambient air, wherein the layer of gas-sensitive material is made in the form of a perforated layer with holes 5-100 nm of carboxylated graphene with a content of carboxyl groups from 8 to 12 at.%, which are covalently bonded to the graphene lattice. A method for manufacturing a gas analytical multisensor chip is also proposed.

EFFECT: gas analytical multi-sensor chip according to the invention has increased sensitivity and selectivity of gas recognition without the need to heat the gas-sensitive layer.

14 cl, 14 dwg