GAS ANALYTICAL MULTISENSOR CHIP BASED ON PHOSPHORYLATED GRAPHENE AND METHOD FOR ITS MANUFACTURE Russian patent published in 2024 - IPC G01N27/12 B82Y40/00 

FIELD: chip industry.

SUBSTANCE: gas analytical multisensor chip based on phosphorylated graphene includes a dielectric substrate on which a layer of gas-sensitive material is formed from phosphorylated graphene of variable thickness containing phosphate groups from 5 at.% up to 8 at.%, which are covalently bonded to the graphene lattice. A method for manufacturing a gas analytical multisensor chip is also proposed, which includes applying a set of coplanar strip electrodes made of noble metal, heaters and thermistors to the surface of a dielectric substrate, aerosol application to at least part of the surface of the electrodes and on the surface of the substrate between the electrodes of a layer of gas-sensitive material, using a mask to create thickness gradient according to a given law. The gas-sensitive material is formed by chemical modification of graphene oxide to produce phosphorylated graphene with a phosphate group content of at least 5 at.%, which are covalently bonded to the graphene lattice.

EFFECT: increased sensitivity and selectivity for gas recognition without the need to heat the gas-sensitive layer of a gas analytical multisensor chip based on phosphorylated graphene and a simplified method for its manufacture.

9 cl, 20 dwg