FIELD: manufacturing technology.
SUBSTANCE: invention relates to a method of manufacturing a micromechanical part made from a single material based on an allotrope of synthetic carbon, wherein the method comprises step of forming a substrate with a negative cavity for the micromechanical part to be manufactured, a step of coating the negative cavity of the substrate in the form of a layer of material based on an allotrope of synthetic carbon, whose thickness is less than the depth of the negative cavity, and a step of removing the substrate to release a solid micromechanical part formed in said negative cavity.
EFFECT: one-piece hollow micromechanical part with multiple functional levels, formed from a material based on an allotrope of synthetic carbon, is disclosed.
19 cl, 27 dwg
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Authors
Dates
2019-03-19—Published
2014-10-06—Filed