FIELD: process engineering.
SUBSTANCE: invention relates to production micromechanical parts by electrotyping, particularly, to watch working mechanisms. This method comprises production of die substrate. Said substrate has top and bottom layers made of electrically conducting silicon-based material and bonded together via insulating mid layer. At least one stencil is etched in top layer down to mid layer to produce at least one cavity in said die. Insulating coating is applied on top surface of said substrate and directly etched along with mid layer to make them available solely on vertical walls formed in said top layer. Then, electrolytic deposition is performed by connecting of electrode to substrate bottom surface conducting layer to obtain the part in said die to withdraw it therefrom.
EFFECT: precise production of parts with several levels and/or high flexibility factor.
18 cl, 19 dwg
Authors
Dates
2014-08-20—Published
2010-03-12—Filed