FIELD: physics, optics.
SUBSTANCE: invention relates to instrument-making, particularly a micromechanical unit, especially a controlled optical filter. The unit comprises a first device layer and a second substrate layer, at least partially attached to each other, wherein the device layer comprises a row of reflecting elements, separated between a certain number of fixed reflecting elements. The fixed elements are connected to the substrate and the cavity is bounded between the substrate and each movable element. Each movable element is configured to generate spring-loaded displacement in the cavity, and a certain number of dielectric spacers are placed in cavities between each movable element and the substrate to avoid electrical contact between them. The dielectric layer has a rough surface.
EFFECT: simple manufacturing process, high reliability and improved controllability of the device.
10 cl, 16 dwg
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