MICROMECHANICAL PART OF COMPLEX SHAPE WITH BORE Russian patent published in 2016 - IPC B81C1/00 C23C16/01 G04B13/02 

FIELD: process engineering.

SUBSTANCE: invention relates to production of micromechanical part (11, 31, 41) from a one-piece material. Proposed method comprises the steps that follow. a) The substrate is made with the negative cavity to house the micromechanical part. b) Provisional ply is produced at one part of the substrate. c) The particles to make the points of growth are deposited at said substrate. d) Said provisional ply is removed for selective removal of all particles from said one part of the substrate. e) The material ply is deposited with the help of chemical vapour-phase deposition to make the material settle only at the points with particles. f) The substrate is removed to release the micromechanical part made in said negative cavity.

EFFECT: preset geometry of micromechanical part, material savings, simplified process.

10 cl, 21 dwg