FIELD: electronics.
SUBSTANCE: invention relates to micro- and nanoelectronics and can be used in production of new generation gas sensors. Disclosed is a method of making a gas sensor comprising a housing, a heterostructure mounted thereon, in which a gas-sensitive layer based on mechanically activated zinc oxide powder is formed, contact pads connected to housing leads, which are placed in insulator, and nozzle ensuring contact of detected gas with gas-sensitive layer. Note here that mechanically activated powder of zinc oxide is produced by two-stage synthesis, at the first stage of which zinc oxide powder is crushed for 5 hours, and at the second stage it is pressed at 17 MPa.
EFFECT: invention simplifies production of gas sensor, which has high sensitivity to reducing gases at low concentrations.
2 cl, 4 dwg
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