NON-CONTACT MICRORELIEF SENSOR Russian patent published in 2019 - IPC G01B15/08 G01N27/00 

FIELD: measuring equipment.

SUBSTANCE: invention can be used to detect and measure microrelief of surface from metals and dielectrics, as well as to surface defectoscopy and detection of inhomogeneity of near-surface layers. Non-contact microrelief sensor consists of one or more microwave resonators located near the analyzed surface and operating using the standing wave amplitude variation effect in the resonator depending on the gap shape between the resonator and the surface, as well as on the surface material properties in the area of its interaction with the resonator. According to the invention, the resonator used is a planar structure on a dielectric substrate, having two resonant slots, in-phase excited by a high-frequency signal, and equipped with a separate port for reading an antiphased signal of such resonance slots.

EFFECT: invention enables to divide the signal into two channels, in which signals which depend on the distance between the sensor and the surface are separately recorded and signals depending on the relief gradient in the active region of the sensor, in addition, such a sensor enables to substantially increase the sensitivity and information content of measurements in the near electromagnetic field microscopy mode.

1 cl, 6 dwg