METHOD OF FORMING PEROVSKITE-LIKE MATERIAL FILM Russian patent published in 2019 - IPC H01L31/18 

Abstract RU 2692110 C1

FIELD: electrical engineering.

SUBSTANCE: invention relates to production of photoelectric converters. Method of forming a film of perovskite-like material with general formula ABX3 includes depositing on the substrate a layer of perovskite-like material of a predetermined thickness, after which halogen is applied on layer until partial or complete liquefaction of said layer is achieved, after which excess halogen is completely removed from layer ABX3 with provision of gradual crystallisation of perovskite-like material on the substrate with formation of grains of perovskite-like material of size greater than in the initial layer.

EFFECT: invention enables to improve the quality of semiconductor films, increase grain size, improve electrical, photoelectric properties of thin films of light-absorbing materials with a perovskite-like structure of ABX3 composition, as well as improvement of physical structure of films without unacceptable change of chemical composition and properties of initial films.

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Authors

Gudilin Evgenij Alekseevich

Tarasov Aleksej Borisovich

Grishko Aleksej Yurevich

Finkelberg Yasha Mikhajlovich

Dates

2019-06-21Published

2018-09-20Filed