METHOD FOR MANUFACTURING ELASTIC ELEMENTS FROM SINGLE-CRYSTAL SILICON Russian patent published in 2022 - IPC H01L21/308 

FIELD: micromechanical sensors production.

SUBSTANCE: invention relates to the field of instrumentation and can be used for the manufacture of micromechanical sensors - sensors of pressure, acceleration, angular velocity. A method for manufacturing elastic elements from single-crystal silicon includes the oxidation of a flat round plate with a certain profile wedge-shaped value with the base surface oriented in the (100) plane, applying a protective layer of photoresist to it, photolithography, opening windows in the oxide layer in the area of ​​elastic elements formation to a certain width c taking into account the anisotropy of etching of single-crystal silicon, anisotropic etching of the plate to a depth to obtain the required thickness of elastic elements, while in the process of anisotropic etching of a flat round plate in the etching solution, it is rotated around its axis in the (100) plane by 360° discretely with a number of steps of at least four.

EFFECT: invention is aimed at improving the metrological characteristics of micromechanical sensors by increasing the accuracy of reproducing elastic elements due to a decrease in the wedge shape and thickness variation of silicon wafers in the process of anisotropic etching.

1 cl, 1 dwg