THERMAL MICROSYSTEM WITH PHOTON HEATING Russian patent published in 2019 - IPC G01P5/10 G01K13/02 

FIELD: measuring equipment.

SUBSTANCE: invention relates to measurement equipment and can be used for measurement of properties and characteristics of gas flows in extreme operating conditions. Disclosed is a thermal microsystem with photon heating, comprising a microsystem heating source and a round-shaped pad, within perimeter of which on both sides there is an electroconductive layer of known chemical composition with external electrical terminals and a guard ring in the form of a mesaplanar structure and a leg, also comprising an electroconductive layer of known chemical composition with external electrical terminals, a guard ring in the form of a mesaplanar structure and a through hole. Heat microsystem heating source is a light source which forms several direct light fluxes with a defined periodicity, which are directed to the microsystems heated elements. One of the directed radiation fluxes passes through the microsystem through hole, forming with the same periodicity as direct light fluxes, on the reverse side of the heat microsystem, an additional heating source of the microsystem elements using the reflecting surfaces installed behind the through hole, located at the required angle to the light flux.

EFFECT: reduced error due to the possibility of using a high-resistance thermoresistive structure, as well as the possibility of local heating of the microsystem owing to use of different reflecting surfaces installed under the required angle, simplification of adjustment of these surfaces, reduced measurement error due to reduced number of elements of electric circuits.

1 cl, 1 dwg