UNIVERSAL MICROSYSTEM BASED ON SILICON CARBIDE Russian patent published in 2018 - IPC G01J5/00 G01K13/02 G01P15/00 

FIELD: measuring equipment.

SUBSTANCE: invention relates to measuring equipment and can be used to measure the velocity and temperature of incandescent gas streams, including flames. Proposed is a universal (pyromechanical) microsystem made of semiconductor silicon carbide and consisting of a pendulum in the form of a pyrometric probe comprising at least one through hole and a fork carrier oriented strictly vertically. Fork carrier includes an axis that extends through the hole of the pyrometric probe.

EFFECT: technical result is higher functionality of a structure based on silicon carbide and reduced values of conductive coupling micro-emitter elements to external devices.

1 cl, 1 dwg