FIELD: chemistry.
SUBSTANCE: present invention relates to a pore-free ceramic which can be used as dimensionally stable substrates in areas which are subjected to temperature gradients, for example, in production of semiconductors. Porous ceramic element has the following chemical composition, wt. %: SiO2 40–55, Al2O3 21–35, MgO 10–15, TiO2 1–11, ZrO2 1–8, where the share of the crystalline phase in said ceramics is at least 60 % and said basic crystalline phase consists of indialite. As a secondary crystalline phase, the ceramic element contains rutile or ZrTiO4. Ceramic element is obtained from a workpiece consisting of primary glass, by means of two-stage heating with intermediate exposures at temperature T1 from interval 550–1000 °C and at temperature T2 of at least 1100 °C.
EFFECT: obtained material has high modulus of elasticity and low coefficient of thermal expansion.
10 cl, 6 dwg, 2 tbl
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