FIELD: radio electronics; measuring equipment.
SUBSTANCE: invention relates to radio electronics and measurement equipment and can be used in production of thin-film resistors and for rapid monitoring of temperature coefficient of resistance (TCR) of films during their manufacture. Method of determining TCR of thin conducting films involves four-probe measurement of surface resistance using a four-probe head, a substrate holder, a substrate holder heater and temperature and surface resistance recording devices, in which the film surface temperature is measured at the location of the probes at the melting point of the metal slice, according to the invention, the temperature of the surface of the thin conductive film is determined visually from the moment of melting and solidification of the metal slices, from which surface resistance measurements are taken, room temperature is selected. At this initial temperature the surface of the substrate holder and the surface of the film have the same temperature. Metal used is, for example, indium, tin, lead, low-temperature alloys based on lead, tin, bismuth and cobalt.
EFFECT: technical result is increase in TCR measurement accuracy, reduction of TCR measurement time and increase in upper temperature limit of the set temperature.
5 cl, 1 dwg
