FIELD: electronic engineering; production of microelectronic devices and digital components.
SUBSTANCE: proposed method for producing thin-film resistors includes vacuum heat pretreatment of substrates mounted in substrate holder by radiation heating and isothermal seasoning for 10 - 15 minutes, precipitation of resistive film on substrates heated to 340 - 380 °C, and their stabilizing annealing at precipitation temperature for 30 minutes; heat pretreatment is effected at temperature exceeding precipitation temperature by 80 - 100 °C, and precipitation of resistive film is conducted with substrate heater switched off.
EFFECT: enhanced yield of high-precision resistors due to reducing impact of uncontrolled destabilizing factors in the course of resistive film precipitation.
1 cl, 1 tbl
| Title | Year | Author | Number |
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