FIELD: microstructure technology.
SUBSTANCE: invention relates to a silicon-based component characterized by at least one reduced contact surface which, obtained by using a method combining at least one step of etching the inclined sidewall with etching of vertical side walls from Bosch, improves, in particular, tribology of components obtained as a result of mechanical micromachining of plate on silicon base.
EFFECT: invention discloses a micromechanical component characterized by a reduced contact surface and a method for production thereof.
8 cl, 12 dwg
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