METHOD FOR MANUFACTURING A MATRIX OF FIELD-EMISSION TUBULAR CATHODES BASED ON DOPED NANOCRYSTALLINE DIAMOND FILMS Russian patent published in 2022 - IPC H01J1/30 H01J9/02 

FIELD: cathodes production.

SUBSTANCE: invention relates to a technology for the manufacture of pointy field emission cathodes based on nanocrystalline (NCD) diamond films with high emission characteristics, which are widely used in vacuum microelectronic devices. In the method for manufacturing a matrix of field-emission point cathodes based on NCD films, each cathode is made in the form of a thin-walled tube with walls made of a doped NCD film by forming vertical cylindrical columns on the surface of a conductive silicon substrate using photolithography and plasma-chemical etching, then seeding the resulting structure with nanodiamond particles with a size less than 5 nm in an ultrasonic bath and deposition of a doped conductive NCD film by the NCD method in an H₂/CH₄ gas mixture with the addition of a dopant gas, further maskless anisotropic etching of the NCD film at the top of the columns using inductively coupled plasma in a mixture of O₂+Ar+He and etching of silicon in SF₆ plasma inside the pillars.

EFFECT: high degree of accuracy in the reproduction of geometric characteristics in the manufacture of pointed tubular field emission cathodes with high emission characteristics, current stability and a long service life.

7 cl, 3 dwg