METAL VACUUM ARC EVAPORATOR Russian patent published in 2014 - IPC C23C14/24 

Abstract RU 2530073 C1

FIELD: metallurgy.

SUBSTANCE: proposed metal evaporator comprises thermal emission cathode and crucible-anode to house metal to be evaporated. Crucible-anode has limiting diaphragm arranged above evaporating metal and provided with bore or through channel. Said limiting diaphragm is made of material with fusion point not lower that of metal evaporation.

EFFECT: higher specific and full power fed to self-sustained discharge, higher ionization of directed flow rate, transition from diffusion evaporation into sublimation evaporation.

5 cl, 1 dwg, 1 ex

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RU 2 530 073 C1

Authors

Kurbatov Petr Fedorovich

Vatnik Sergej Markovich

Vedin Ivan Aleksandrovich

Androsov Gennadij Nikolaevich

Bel'Tjugov Vladimir Nikolaevich

Dates

2014-10-10Published

2013-09-23Filed