TECHNIQUE TO SPUTTER VACUUM COATS IN HOLES Russian patent published in 2003 - IPC

FIELD: deposition of coats in vacuum, deposition of coats by method of electron-beam heating of evaporated material with its simultaneous deposition on internal surfaces of parts of complicated form. SUBSTANCE: in compliance with invention electron beam is directed perpendicular to surface of solid evaporator placed horizontally directly through holes to be coated. Parts with holes to be coated are arranged on surface of evaporator facing electron-beam gun. Axes of holes are oriented perpendicular to this surface. Holes are closed by masks on both sides. Mask bordering on evaporator has coaxial holes which ensure feed of vapors on coated surfaces. Mask closing part on side of electron beam functions as diaphragm and limits effluent of vapors outside from sputtered space. It has holes needed for passage of focused electron beam through them. EFFECT: increased productivity of technique and stability of deposited coat. 1 dwg