FIELD: machine building.
SUBSTANCE: proposed method comprises heating of material to be evaporated by electron beam and measuring thickness of applied coating. Note here that voltage is fed to anode to create voltage between electrodes corresponding to vapor ionisation potential of material being evaporated. Stable discharge is initiated in vapors of evaporated material to maintain constant discharge current by correcting electron beam current at selected voltage. Coating thickness is measured with the help of discharge integrator, its signal being fed to shutter drive to terminate evaporation process at reaching preset coating thickness.
EFFECT: continuous control over thickness and application rate, possibility to make preset thickness of the coating.
1 ex, 7 dwg
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