FIELD: manufacturing technology.
SUBSTANCE: invention relates to a multilayer structure in which adjacent layers have different radiation absorption characteristics and can be used in biotechnology, optoelectronics and microelectromechanical systems. Method includes formation of a working package containing the first substrate layer, the second substrate layer and radiation absorbing material located between the first substrate layer and the second substrate layer. Working package contains a cavity containing a special liquid. Radiation absorbing material and at least one layer from the first substrate layer and the second substrate layer confine the interface boundary region to each other. Boundary area of the connection contains a film of the specified liquid. Method also includes direction of radiation on boundary area of connection for formation of perimeter joint. Perimetral suture separates the cavity from the outer zone of the boundary area of the joint. Method also includes directing radiation to the outer zone of the boundary region of the connection for bonding the first substrate layer to the second substrate layer. Perimetral suture prevents penetration of bubbles from the outer zone into the cavity when the radiation is directed to the external zone.
EFFECT: invention increases strength of connection of substrate with radiation-absorbing material.
17 cl, 22 dwg
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Authors
Dates
2019-12-27—Published
2017-12-12—Filed