METHOD OF PRODUCING COMPOSITE HIGH-ANISOTROPIC MATERIAL COPT-AlO WITH ROTATIONAL ANISOTROPY Russian patent published in 2020 - IPC C23C14/35 B82B3/00 

FIELD: technological processes.

SUBSTANCE: invention relates to technological processes related to production of high-anisotropic composite materials by means of solid-state reactions by aluminothermy method and formation of magnetic rotational anisotropy in them. Obtained material can be used as elements of spintronics and microelectronics. Method for producing composite high-anisotropic CoPt-Al₂O₃ material with rotational anisotropy is characterized by that on a monocrystalline substrate is deposited by magnetron sputtering in vacuum of 10^-6 Torr at temperature of 250 °C platinum layer, then on platinum layer by thermal deposition in vacuum 10^-6 Torr is applied a layer of cobalt at room temperature, method includes vacuum annealing of the obtained two-layer film at temperature 400 °C for 90 minutes to form magnetically rigid phase L1₀-CoPt(111), which is subjected to oxidation in air at temperature of 550 °C for 3 hours, then on produced surface of Co₃O₄+Pt film by thermal deposition aluminum layer is applied in vacuum 10^-6 Torr at room temperature and annealing the obtained film structure of Al/Co₃O₄+Pt in vacuum 10^-6 Torr in temperature range from 350 to 650 °C with pitch 100 °C and holding at each temperature for 40 minutes. CoPt-Al₂O₃ film is obtained using solid-phase reactions, having a magnetization ~700 emu/cm³, coercive force of 5 kOe and having magnetic rotational anisotropy L_rot=7⋅10⁵ emu/cm³, allowing arbitrary installation of light axis of magnetization in any direction relative to plane of film using magnetic field value greater than value of coercive force.

EFFECT: disclosed is a method of producing composite high-anisotropic material CoPt-Al₂O₃ with rotational anisotropy.

1 cl, 1 dwg, 1 ex